JEOL JXA-8530F Electron Probe Micro analyzer
The JXA-8530F is a thermal field emission electron probe micro analyzer combining high SEM resolution with high quality composition analysis of submicron areas. The JEOL JXA-8530F instrument is equipped with 6 WDS detectors (3 for heavy elements and 3 for light elements) and an energy dispersive X-ray spectrometer (EDS). This combination can simultaneously analyse 3 elements WDS + 16 elements EDS plus collect image signals from backscatter and secondary electron detectors.
- High detection sensitivity for trace elements
- High accuracy of quantitative analysis
- High resolving power for adjacent X-ray spectra
- High accuracy of light elements analysis
Specifications:
- Detectable element range : 4Be to 92U Detectable X-ray range:
- Detectable wavelength range with WDS: 0.087 to 9.3 nm
- Detectable energy range with EDS : 20 kev
- Number of Spectrometers: 6 WDS detectors, 1 EDS
- Acc.Voltage: 1 to 30 kV (0.1 kV steps)
- Scanning Magnification: X 40 to 300.000 (W.D.11mm)
- Probe current: 1×10-12 to 5×10-7 A
- Probe Current stability: +(-)0.3%/h
- Secondary electron image resolution (SEI): 3.0 nm (WD11mm, 30 kV)
- Backscattered electron image (BEI) : Topo and composition image
Minimum Probe Size
- 40nm (10 kV, 1X 10 -8 A)
- 100nm (10 kV, 1X 10 -7 A)
Specimen size:
- 32 mm dia. X 25 mmH
- 36 mm dia. X 20 mmH X 4 pcs
- 25.5 mm dia X 20 mmH X 9 pcs
Booking details:
- Click Here to download user request form.
- R.Ravi(rravi@iisc.ac.in) / Aloke Paul(aloke@iisc.ac.in) / Chandan Srivastava(csrivastava@iisc.ac.in)