Electron Probe Micro Analyzer

JEOL JXA-8530F Electron Probe Micro analyzer

The JXA-8530F is a thermal field emission electron probe micro analyzer combining high SEM resolution with high quality composition analysis of submicron areas. The JEOL JXA-8530F instrument is equipped with 6 WDS detectors (3 for heavy elements and 3 for light elements) and an energy dispersive X-ray spectrometer (EDS). This combination can simultaneously analyse 3 elements WDS + 16 elements EDS plus collect image signals from backscatter and secondary electron detectors.

  • High detection sensitivity for trace elements
  • High accuracy of quantitative analysis
  • High resolving power for adjacent X-ray spectra
  • High accuracy of light elements analysis

Specifications:

  • Detectable element range : 4Be to 92U Detectable X-ray range:
  • Detectable wavelength range with WDS: 0.087 to 9.3 nm
  • Detectable energy range with EDS : 20 kev
  • Number of Spectrometers: 6 WDS detectors, 1 EDS
  • Acc.Voltage: 1 to 30 kV (0.1 kV steps)
  • Scanning Magnification: X 40 to 300.000 (W.D.11mm)
  • Probe current: 1×10-12 to 5×10-7 A
  • Probe Current stability: +(-)0.3%/h
  • Secondary electron image resolution (SEI): 3.0 nm (WD11mm, 30 kV)
  • Backscattered electron image (BEI) : Topo and composition image

Minimum Probe Size

  • 40nm (10 kV, 1X 10 -8 A)
  • 100nm (10 kV, 1X 10 -7 A)

Specimen size:

  • 32 mm dia. X 25 mmH
  • 36 mm dia. X 20 mmH X 4 pcs
  • 25.5 mm dia X 20 mmH X 9 pcs

Booking details:

  • Click Here to download user request form.
  • R.Ravi(rravi@materials…) / Aloke Paul(aloke@materials…) / Chandan Srivastava(csrivastava@materials…)